Three-axis standalone prealigners for 45mm to 480mm substrates of any transparency, featuring single-unit handling of objects of multiple sizes, chuck- and pin-load modes, high precision options, and more.
Single-axis embedded prealigners for 45mm to 470mm objects of any transparency in high speed wafer transfer systems featuring easy integration with market-available robots and a variety of options.
Innovative autonomous devices featuring Passive Edge Contact with zero gripping force and no wafer stress - an alternative to edge-gripping technology - for handling of objects 75mm - 300mm.
Solutions utilizing Logosol's prealigner technology for applications with special requirements, including vacuum, dual layer, ultra thin, and warped substrate handling.